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. 2020 Jul 10;6(28):eaba8595. doi: 10.1126/sciadv.aba8595

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Copyright © 2020 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution License 4.0 (CC BY).

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Fig. 2 — (A) Dynamic space beam coding module. DMD modulates the incident light at a high speed, e.g., maximum 9523 Hz in our experiment. The lens and microscope objective perform as a 4f system to narrow the coded incident beam to illuminate the different regions of the metasurface. (B) Geometrical diagram of SiN_x nanopillars and characterization of amplitude transmission efficiency and phase response of SiN_x nanopillars as functions of nanopillar radius at a wavelength of 633 nm. The illustration is a geometrical diagram of SiN_x nanopillars. (C and D) Scanning electron microscopy (SEM) images of the fabricated results. Scale bars, 1 μm.