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. 2020 Jul 20;9:124. doi: 10.1038/s41377-020-00365-w

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© The Author(s) 2020

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 2 — a Microscope image of the probe with the flat front surface highlighted. b Microscope image of the probe with the curved TIR surface highlighted. c Confocal surface measurement result of the flat interface from a. d Confocal surface measurement result of a curved TIR mirror surface b. e Deviation from the ideal shape in the case of the flat surface. The RMS deviation for a beam footprint corresponding to an NA of 0.14 is 43 nm. f Deviation from the ideal shape in the case of the TIR surface. The RMS deviation for a beam footprint corresponding to an NA of 0.14 is 19 nm. The visible elliptical ring patterns are caused by the rasterization of the 3D printer within each printing layer and did not have a discernible impact on the optical performance