Table 1.
FIB as an independent instrument or combined with other techniques.
Synergistic techniques | Features | Target materials | Conditions and suggestions | References |
---|---|---|---|---|
Stand-alone FIB-SEM | Cross-section imaging or 3D tomography integrated with multiple detectors | Clay minerals and oil shales (this study) | (1) Medium current to balance milling speed and minimized curtain effect (2) Pt coated for protective layer (3) Acquire high-resolution SE and BSE image simultaneously for later image segmentation |
[92–94] |
| ||||
FIB and TEM | Microstructural and crystallographic characterization | Earth & planetary materials such as ore minerals, high pressure phases and extraterrestrial materials | (1) Stepping down the polishing currents to 10~50 pA/5 kV or even lower (2) For irregular small particles, E-beam for Pt deposition is necessary |
[36, 42, 56, 95, 96] |
| ||||
FIB and APT | 3D chemical and isotopic information | U-Th-Pb isotope systems & trace element compositions in zircon, monazite etc. | (1) Pt/Au-coated as protective layer—evaporation field of carbon is too high (2) Make a mark for selected position if the area of interest is relatively small |
[64, 65, 97–99] |
| ||||
FIB and synchrotron techniques | Elemental mapping | Terrestrial shale kerogen organic carbon & extraterrestrial organic matter in planetary materials, e.g., carbonaceous chondrites. | (1) None carbon capping. Ideally no EXPOXY embedding (2) Low current for final milling and low KV E-beam imaging to minimize damage (3) Ensure STXM is performed prior to TEM on organic materials due to alteration of organic by high energy TEM beam |
[68, 73, 100] |