Table 2.

Overview of ion beam current and resolution in commercial FIB systems.

FIB	Beam current	Resolution
Ga	0.1-100 nA	~3 nm
He	0.1-100 pA	~0.5 nm
Ne	0.1-100 pA	~1.9 nm
Xe	0.1-2 μA	<20 nm