Table 1. Comparison of acquisition parameters for different magnifications.

Magnification	×105 000	×130 000	×165 000
Pixel size (Å)	1.34	1.04	0.81
Beam size (diameter) (nm)	750	600	450
No. of shots per 2 µm diameter hole	5	9	15
Area imaged (considering a K2 camera, 3838 × 3710 pixels) (µm2)	∼1.3	∼1.4	∼1.4
Electron dose rate at the camera (electrons per pixel per second)	4	4	4
Total electron dose at the sample (e− Å−2)	∼40	∼40	∼40
Exposure time per position (s)	∼18	∼10	∼6
Total exposure time per hole (s)	∼90	∼90	∼90