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. Author manuscript; available in PMC: 2021 Jul 8.
Published in final edited form as: Nano Lett. 2020 Jun 8;20(7):5383–5390. doi: 10.1021/acs.nanolett.0c01729

Figure 1. Fabrication of single cell grippers with magnetic response and a thermally responsive trigger.

Figure 1.

(a) Schematics of the fabrication process for single cell grippers which include the following steps, (i) photolithography and deposition of the silicon monoxide (SiO) and silicon dioxide (SiO2) bilayer as the stress layer; (ii) photolithography and deposition of silicon dioxide and iron as the rigid segments for magnetic response; (iii) patterning of the paraffin layer by photoresist molding, paraffin spin coating and lift-off. (b-c) SEM image of (b) a gripper without the paraffin layer, and (c) a zoom-in view at the hinge. (d-e) SEM image of (d) a gripper with paraffin layer, and (e) a zoom-in view at the hinge. (f) Optical image of an array of single cell grippers, with rigid iron segments and transparent (SiO/SiO2) bilayer hinges; the transparent paraffin layer covers the entire gripper. (g) SEM image of a large array of grippers with a patterned paraffin layer on top.