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. 2020 Jun 28;11(7):630. doi: 10.3390/mi11070630

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© 2020 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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(a) Structure of the TC-FBAR with SiOF layer [99]. (b) Passband performance of TC-FBAR of structure 3 and conventional FBAR [99]. Reproduced with permission from [99].