. 2020 Jun 28;11(7):630. doi: 10.3390/mi11070630

Table 4.

Performance of reported BAW resonators based on tunable materials.

Material	Freq (GHz)	Tuning Ability¹ (%)	Max Bias (V)	Q²	Max k_eff² (%)	Reference
SrTiO₃	5.87	f_r:1	7.5	78(Q_s)	2	[110]
BaTiO₃	~4	f_r:1.3 f_a:4.0	10	30	6.2	[108]
Ba_0.25Sr_0.75TiO₃	~4	f_r:1.2 f_a:0.8	10	120	0.5	[108]
Ba_0.25Sr_0.75TiO₃	~5	f_r:0.9	25	250(Q_s) 350(Q_s-de)	–	[111]
Ba_0.25Sr_0.75TiO₃	5.46	f_r:2	50	50(Q_s) 140(Q_p)	4.4	[112]
Ba_0.25Sr_0.75TiO₃	5.76	f_r:3.8	25	130(Q_s)	7.1	[113]
Ba_0.25Sr_0.75TiO₃	5.46	f_r:1.9	50	260(Q_s-de)	3.5	[114]
Ba_0.3Sr_0.7TiO₃	2.85	f_r:2.4 f_a:0.6	615 kV/cm	200(Q_s) 120(Q_p)	4.4	[109]
Ba_0.5Sr_0.5TiO₃	5.45	f_r:2.4	50	250(Q_s-de)	7.5	[114]
Ba_0.7Sr_0.3TiO₃	5.44	f_r:1.3	6	352.6(Q_s) 746(Q_p)	17.15	[115]

¹ Tuning ability at resonance frequency f_r and antiresonance frequency f_a. ² Q-factor at series resonance Q_s, parallel resonance Q_p and series resonance after de-embedding Q_s-de.