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. 2020 Jun 29;11(7):641. doi: 10.3390/mi11070641

Figure 4.

Figure 4

A rotating stage with an aluminium stage was mounted in the vacuum chamber at 85°. A Cu tube, acting as a channel for liquid nitrogen, is bonded to the aluminium stage via a bearing, and rotational deposition can be performed while cooling to −100 °C. (a) Schematic of the deposition system. (b) Photographs taken during deposition.