Table 1. Performance Comparison of QCM Humidity Sensors in Other Literatures.
| material | range | sensitivity | response/recovery time | references |
|---|---|---|---|---|
| MWCNTs/GO | 10–80% RH | 9.8 Hz/% RH | 4 s/3 s | (58) |
| CdS | 17–85% RH | 11.8 Hz/% RH | 36 s | (59) |
| GO | 6.4–97% RH | 22.1 Hz/% RH | 45 s/24 s | (22) |
| UFR/nano-silica | 11–83% RH | 10.3 Hz/% RH | 12 s/25 s | (60) |
| ZnO | 11–97% RH | 1 Hz/% RH | 36 s/12 s | (61) |
| ZnS | 22–97% RH | 10 Hz/% RH | 42 s/259 s | (62) |
| PANI | 20–80% RH | 3 Hz/% RH | 5 s/40 s | (63) |
| anodized alumina | 27–59% RH | 2 Hz/% RH | 5 s/5 s | (64) |
| SnO2–SiO2 | 11–96% RH | 9.4 Hz/% RH | 14 s/16 s | (65) |
| BiOCl | 11–97% RH | 7.3 Hz/% RH | 5.2 s/4.5 s | this work |