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. 2020 Jul 21;11(7):704. doi: 10.3390/mi11070704

Figure 2.

Figure 2

(a) An optical image of the Micro-Electro-Mechanical System (MEMS) mirror showing one of its two-level-ladder, double S-shaped actuators (red square); (b) Scanning electron microscopic (SEM) image showing the four actuators with the mirror plate; (c) Assembled probe; (d) Probe mechanical components.