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. 2020 Jul 21;11(7):704. doi: 10.3390/mi11070704

Table 1.

Comparison of the main mechanical properties between three MEMS mirrors deploying Al/SiO2 dual S-shaped bimorph electrothermal actuators with a different actuators level architecture each.

Single Level Double Level Three Level
OSA/Voltage ±13°/4 V [15] ±24°/4 V ±17.5°/5 V [26]
Response time 4.3–4.6 ms [25] ~4.5–5.5 ms ~28 ms [27]
First order resonant frequency 191 Hz [15] 950 Hz 1.3 KHz [26]