Table 12.

Relative thickness determinations error after correction of dielectric constant.

$\mathbf{\Delta }\mathit{d}$ [%]	m1	m2	m3	m4	m5	Mean of the Absolute Value
wI	−4	−4	0	4	3	3
wII	−10	0	−1	−1	10	4
wIII	−7	−1	−2	−1	11	5
wIV	−3	−6	0	0	9	4
wV	8	gross error	2	4	−17	6
wVI	−3	gross error	9	−4	−3	4