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. 2020 Jul 21;20(14):4054. doi: 10.3390/s20144054

Figure 2.

Figure 2

Conceptual illustrations of a MEMS accelerometer with GAS. Left: a proof mass in an equilibrium position is connected to a spring in the y-direction with stiffness ky and two springs forming the GAS in the x-direction of stiffness kc, producing a lateral preloading force Fc as the springs with stiffness kc are compressed to a length Lc. Right: the proof-mass in a displaced state with a displacement of Δy, introducing a rotation θ and a restoring force Fk = −ky*Δy. Fc,y is the sum of the parts of Fc along the axis of sensitivity. Ftot is partly canceled by Fc,y [13,16].