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. 2020 Jul 21;20(14):4054. doi: 10.3390/s20144054

Figure 3.

Figure 3

SEM images of MEMS accelerometer developed by Boom and Kamp et al. at Nikhef and University of Twente [13,16]: (a) entire sensor chip, (b) sense comb fingers, (c) actuation electrodes, (d) preloading mechanisms, (e) one of the suspension spring sets in a compressed state.