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. 2020 Jul 21;20(14):4054. doi: 10.3390/s20144054

Figure 8.

Figure 8

Images of the MEMS accelerometer developed by Wu et al. at Huazhong University of Science and Technology [39]: (a) assembled MEMS accelerometer; (b) top cap; (c) suspended proof-mass; (d) bottom cap; (e) schematic drawing of the MEMS accelerometer.