Figure 10.
Schematic diagrams of the Hewlett Packard MEMS accelerometer and its sensing scheme: (a) schematic cross-section of the MEMS accelerometer [46]; (b) HP’s three phase capacitive sensing electrode arrangement.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.