Figure 12.
Images of the MEMS accelerometer and the readout ASIC developed by Utz et al. at Fraunhofer Institute for Microelectronic Circuits and Systems [55]: (a) SEM image of the MEMS accelerometer; (b) photograph of the readout ASIC.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.