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. 2020 Jul 21;20(14):4054. doi: 10.3390/s20144054

Figure 14.

Figure 14

Schematic diagrams of the capacitive MEMS accelerometer with high AR capacitive gap values developed by Abdolvand et al. at Georgia Institute of Technology [62]: (a) the MEMS capacitive accelerometer; (b) highest gap aspect ratio of 40:1 at the shock-stop gaps.