Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Schematic diagrams of the sub-wavelength gratings and the optical MEMS accelerometer developed by Carr and Keeler et al. at Sandia National Laboratory and Symphony Acoustics [69,70,71]: (a) cross section of laterally deformable sub-wavelength grating ([Reprinted] with permission from ref [65] © The Optical Society); (b) SEM of fabricated optical MEMS accelerometer.
