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. 2020 Jul 21;20(14):4054. doi: 10.3390/s20144054

Figure 17.

Figure 17

Schematic diagrams of the resonant MEMS accelerometer developed by Zou and Seshia at Cambridge University [101]: (a) the resonant MEMS accelerometer comprising four single stage force amplification mechanisms; (b) a single-stage force amplification mechanism.