Table 1.

Typical specifications of MEMS accelerometers on three performance levels, including tactical grade, navigation grade as well as auto control [5].

Parameters	Navigation Grade	Tactical Grade	Consumer Grade
Input range	±1 g	±5 g	±50 g
Noise	<50 μg	<100 μg	<50 mg
Working Frequency	100 Hz	100 Hz	400 Hz
Sensitivity	<100 μg	<200 μg	<50 mg
Nonlinearity	<0.05%	<0.1%	<2%
Max shock input	>10 g	>20 g	>2000 g
Partial axis sensitivity	<0.1%	<0.3%	<5%