Table 3.
Summary of micromachined accelerometers with a sub-µg/√Hz noise floor.
| Research Group | Noise Floor | Dynamic Range /Full Scale Range |
Resonant Frequency | Type |
|---|---|---|---|---|
| Boom and Kamp et al. [16] | 2 ng/√Hz (at 28.1 Hz) | -- | 3–28.1 Hz | #+^ |
| Middlemiss et al. [18] | 8 ng/√Hz (at 1 Hz) | -- | 2.31 Hz | #+^ |
| Zhang et al. [22] | 51.8 ng/√Hz (at 1 Hz) | -- | 158 Hz | #^ |
| Tang et al. [24] | 8 ng/√Hz (at 1 Hz) | +8 mg | 0.5–3 Hz | #+^ |
| Pike et al. [31] | 0.25 ng/√Hz (at 0.1–10 Hz) | -- | 6 Hz | + |
| Wu et al. [39] | 10–50 ng/√Hz (at 1 Hz) | ±1.4 g | 13.2 Hz | + |
| Edalatfar et al. [44] | 350 ng/√Hz (at 1–5 kHz) | 135 dB | 4500 Hz | + |
| Yazdi and Najafi [45] | 160 ng/√Hz | -- | <1000 Hz | + |
| Aaltonen et al. [9] | 300 ng/√Hz (at 30 Hz) | ±1.5 g | 300 Hz | +^ |
| Xu et al. [11] | 200 ng/√Hz (at 100 Hz) | ±1.2 g | 700 Hz | ^ |
| Utz and Kraft et al. [55] | 216 ng/√Hz (at 30–40 Hz) | ±1.25 g/5 g | 5000 Hz | #- |
| Kamada and Furubayashi et al. [56] | 30 ng/√Hz (at 10–300 Hz) | 116 dB | 300 Hz | #-^ |
| Krishnamoorthy and Carr et al. [71] | 17 ng/√Hz (at 1 Hz) | 140 dB | 36 Hz | +^& |
| Williams and Silicon Audio et al. [74] | 0.5 ng/√Hz (at 10 Hz) | 172 dB | 0.005–1.5 kHz | +& |
| Lu et al. [77] | 185.8 ng/√Hz | -- | 34.5 Hz | +& |
| Fourguette et al. [87] | 10 ng/√Hz | 120 dB | 80 Hz | +& |
| Duo et al. [90] | 312 ng/√Hz (at 100 Hz) | -- | 100 Hz | & |
| Loh et al. [92] | 40 ng/√Hz (at 40 Hz) | 85 dB (at 40 Hz) | 80-1000 Hz | +& |
| Flores et al. [96] | 196 ng/√Hz | -- | 63,300 Hz | & |
| Zou and Seshia [100] | 144 ng/√Hz (at <1–50 Hz) | ±0.05 g | 1–50 Hz | +^& |
| Pandit and Seshia et al. [102] | 17.8 ng/√Hz (at 0.25–4 Hz) | ±1 g | 5 Hz | +^& |
| Zhao and Seshia et al. [103] | 98 ng/√Hz (at 1 Hz) | ±1 g | 5 Hz | +^& |
| Yin et al. [104] | 380 ng/√Hz | ±15 g | 2.7 Hz | +^& |
| Zhao and Seshia et al. [116] | 680 ng/√Hz (at 0.5–3 Hz) | -- | 3 Hz | ^& |
| Abdolvand and Ayazi et al. [62] | 213 ng/√Hz (at 2 Hz) | -- | 200 Hz | +^& |
| Liu and Kenny [118] | 20 ng/√Hz (at 10–1000 Hz) | 90 dB | 5–1500 Hz | +^& |
| Liang, Hua and Agafonov et al. [121] | 17.8 ng/√Hz (at 1.2 Hz) | -- | 1.2 Hz | & |
| Deng et al. [124] | 3.2 ng/√Hz (at 0.02 Hz) | ±0.01 g | 0.2–5 Hz | & |
| EI Mansouri et al. [21] | 17.02 ng/√Hz | -- | 8.7 Hz | #+^- |
| Guzman Cervantes et al. [81] | 10 ng/√Hz | -- | 2000 Hz | & |
| Bao et al. [85] | <1000 ng/√Hz | -- | -- | & |
| Zhao et al. [86] | 42.4 ng/√Hz | -- | 29.3 Hz | & |
| Shin and Kenny et al. [105] | <160 ng/√Hz | -- | -- | +^& |
| HP [46]. | 10 ng/√Hz (at 10–200 Hz) | 120 dB | 1–200 Hz | +^- |
| Safran Colibrys SF1500 [48] | 300 ng/√Hz (at 10–1000 Hz) | ±3 g | 0–1500 Hz | +^- |
| Kinemetrics EpiSensor 2 [49] | 3 ng/√Hz (at 1 Hz) | ±0.25 g | 0–>320 Hz | +- |
| Reftek Trimble 147A [50] | 10 ng/√Hz | ±4 g | 0–150 Hz | +- |
| Sercel DSU1-508 [51] | 15 ng/√Hz (at 10–200 Hz) | 5 g | 0–800 Hz | +^- |
| INOVA ACCUSEIS SL11 [53] | 30 ng/√Hz (at 3–400 Hz) | 118 dB | 3–400 Hz | +- |
| Honeywell QA3000 [54] | <1000 ng/√Hz | ±60 g | >300 Hz | ^-+ |
+: Large proof mass. ^: High Q. #: Low spring constant. -: Low noise interface circuit. &: Novel sensing scheme.