Table 4.

Summary of micromachined accelerometers with more than µg/√Hz noise floor but a potential to achieve a sub-µg/√Hz noise floor.

Research Group	Noise Floor	Dynamic Range /Full Scale Range	Resonant Frequency	Type
Han et al. [125]	3.0 μg/√Hz (at 0.2–10 Hz)	±0.0029 g	0.2–10 Hz	#
Suzuki et al. [25]	45.0 μg/√Hz	--	37 Hz	#
Krause et al. [94]	10.0 μg/√Hz (at 5–25 kHz)	40 dB	>20,000 Hz	&