Figure 1.

(a) The layout of micro-fabricated microwave biosensor, (b) equivalent circuit of the resonator-based microwave biosensor, (c) magnified view of the air-bridge structure, (d) scanning electron microscope (SEM) image of the air-bridge structure, focused ion beam (FIB) image of micro-fabricated microwave resonator, (e) top view of micro-fabricated microwave biosensor, and (f) E-field intensity simulation of proposed microwave biosensor indicating maximum electric field concentrated at the center of the microwave biosensor.