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. Author manuscript; available in PMC: 2021 Aug 21.
Published in final edited form as: J Mater Chem B. 2020 Jun 17;8(31):6588–6609. doi: 10.1039/d0tb00681e

Figure 1. Generalized schematic of CVD techniques.

Figure 1.

A CVD reactor typically consists of 3 main parts: precursors gas inlet, deposition chamber and gas exhaust. Blue and purple circles represent precursors in the vapor phase, orange circles activated/reactive species on the substrate surface, and orange line the as-deposited polymer thin film.