. Author manuscript; available in PMC: 2021 Aug 21.

Published in final edited form as: J Mater Chem B. 2020 Jun 17;8(31):6588–6609. doi: 10.1039/d0tb00681e

Table 3.

Functional CVD polymers for biosensing and bio-MEMS.

Polymer	Acronym	Property / Performance	CVD Technique
Poly(2-hydroxyethyl methacrylate)	pHEMA	Hydrophilic, Biocompatible / Antifouling	piCVD⁶⁶,iCVD¹³⁴
Poly(trivinyl trimethyl cyclotrisiloxane–hexavinyl disiloxane)	pV₃D₃–HVDS	Silicone-based, Hydrophobic / Insulating, Antifouling	iCVD¹²⁸
Poly(p-xylylene)	pPX	Hydrophobic / Biofunctionalizable, Adhesive	CVP^129,138,139
Poly(glycidyl methacrylate)	pGMA	Hydrophobic / Adhesive	iCVD^135,137
Poly(allylamine)	pAAm	Hydrophobic / Adhesive	iCVD¹³⁵
Poly(amino styrene)	pAS	Hydrophobic / Adhesive	iCVD¹³⁶