Table 1.
Design Points | Coded Independent Variables | Response Values | ||||
---|---|---|---|---|---|---|
X1 | X2 | X3 | X4 | EE (%) | Size (nm) | |
1 | −1 | −1 | −1 | −1 | 23.6 | 135.2 |
2 | 1 | −1 | −1 | −1 | 31.3 | 153.0 |
3 | −1 | 1 | −1 | −1 | 65.3 | 183.5 |
4 | 1 | 1 | −1 | −1 | 65.6 | 170.1 |
5 | −1 | −1 | 1 | −1 | 22.1 | 132.4 |
6 | 1 | −1 | 1 | −1 | 28.8 | 152.8 |
7 | −1 | 1 | 1 | −1 | 48.4 | 180.8 |
8 | 1 | 1 | 1 | −1 | 30.0 | 138.9 |
9 | −1 | −1 | −1 | 1 | 45.9 | 155.5 |
10 | 1 | −1 | −1 | 1 | 19.5 | 126.1 |
11 | −1 | 1 | −1 | 1 | 24.7 | 148.7 |
12 | 1 | 1 | −1 | 1 | 21.9 | 179.6 |
13 | −1 | −1 | 1 | 1 | 44.3 | 143.6 |
14 | 1 | −1 | 1 | 1 | 18.3 | 147.1 |
15 | −1 | 1 | 1 | 1 | 43.6 | 147.8 |
16 | 1 | 1 | 1 | 1 | 43.0 | 130.8 |
17 | −2 | 0 | 0 | 0 | 38.0 | 164.8 |
18 | 2 | 0 | 0 | 0 | 29.1 | 138.6 |
19 | 0 | −2 | 0 | 0 | 19.2 | 134.8 |
20 | 0 | 2 | 0 | 0 | 44.3 | 157.5 |
21 | 0 | 0 | −2 | 0 | 34.5 | 206.3 |
22 | 0 | 0 | 2 | 0 | 48.1 | 144.2 |
23 | 0 | 0 | 0 | −2 | 21.2 | 172.7 |
24 | 0 | 0 | 0 | 2 | 25.9 | 127.0 |
25 | 0 | 0 | 0 | 0 | 19.5 | 142.9 |
26 | 0 | 0 | 0 | 0 | 23.6 | 119.6 |
27 | 0 | 0 | 0 | 0 | 14.9 | 122.5 |
28 | 0 | 0 | 0 | 0 | 19.6 | 124.8 |
29 | 0 | 0 | 0 | 0 | 24.8 | 127.0 |
30 | 0 | 0 | 0 | 0 | 26.7 | 133.1 |
31 | 0 | 0 | 0 | 0 | 28.1 | 129.7 |