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Sizing of Pt/AlN/Sapphire structure.
| Parameters | Settings |
|---|---|
| Wavelength (2p) | 1.7 µm |
| Platinum electrode thickness | 90 nm |
| Tantalum adhesion layer | 10 nm |
| Metallization ratio | 1/2 |
| Aperture (W) | 30 µm |
| Thickness of AlN c-axis layer | 1 µm |
| Thickness of substrate c-axis | 50 µm |
