Figure 2.

(a) Model of the proposed force sensor, consisting of a central sensing unit made of a layer of piezo film “sandwiched” by two gold electrodes (side view), which connect to the electrical pads (front view). (b) Working principle of the force sensor when actuated by a force applied on the top electrode and mechanically supported by the bottom one, thus inducing an equivalent output voltage (V). (c) Batch of force sensors fabricated on the same piezo film substrate before individually diced (left) and SEM image of an individual force sensor (right). (d) Computational mesh designed for mechanical simulation of the proposed force sensor, with the axial application of the force at the center of the sensing area and fixed support along the bottom surface of the entire structure. (e) Displacement of the sensor for a 10 mN load. (f) Minimum life cycle allocated to the sensor when subjected to a force of 10 mN (fatigue analysis).