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Element analysis using energy-dispersive X-ray spectroscopy (EDS) of fluorinated diamond-like carbon (F-DLC) coating of 30% fluorine: (A) A surface image of F-DLC coating obtained by electron microscopy (acceleration: 1000×; voltage: 5.00 kV). (B) EDS analysis showed that the carbon-to-fluorine ratio was 7:3. The surface fluorine concentration was 30%.
