Figure 9.

Resolution in scanning X-ray microscopy at 35 keV with corrective phase plate. (a) Reconstructed object phase shift via ptychography from the central part of a Siemens star test object. Spoke features range from 50 nm size in the innermost circle to about 200 nm for the outermost circle. (b) The same area as in (a), but in fluorescence contrast. The scan was performed with 100 nm steps with 21 × 21 scan points. The scale bar in both images represents 2 µm. The innermost spoke size in each radial segment is noted below the figures.