Table 3. Mirror specifications for the vertical focusing mirror (VFM) and the horizontally focusing mirror (HFM).
Mirror bulk material | Si |
Mirror surface materials | Si, Rh, Pt |
Length of mirrors | 450 mm (350 mm optical length) |
Grazing-incidence angle | 3 mrad |
VFM shape | Pre-shaped to form an elliptic cylinder at nominal curvature using a one-moment mechanical bender |
VFM slope errors | 0.3/0.18 µrad (specification/measured) |
0.18/0.14 µrad over 200 mm | |
VFM roughness | 3 Å/2 Å (specification/measured) |
HFM shape | Flat, one-moment mechanical bender giving a spherical cylinder |
HFM slope errors | 0.3/0.29 µrad (specification/measured) |
0.14 µrad measured over 250 mm | |
HFM roughness | 2.5 Å/2 Å (specification/measured) |