Table 3. Mirror specifications for the vertical focusing mirror (VFM) and the horizontally focusing mirror (HFM).

Mirror bulk material	Si
Mirror surface materials	Si, Rh, Pt
Length of mirrors	450 mm (350 mm optical length)
Grazing-incidence angle	3 mrad
VFM shape	Pre-shaped to form an elliptic cylinder at nominal curvature using a one-moment mechanical bender
VFM slope errors	0.3/0.18 µrad (specification/measured)
	0.18/0.14 µrad over 200 mm
VFM roughness	3 Å/2 Å (specification/measured)
HFM shape	Flat, one-moment mechanical bender giving a spherical cylinder
HFM slope errors	0.3/0.29 µrad (specification/measured)
	0.14 µrad measured over 250 mm
HFM roughness	2.5 Å/2 Å (specification/measured)