Skip to main content
. Author manuscript; available in PMC: 2021 Nov 1.
Published in final edited form as: Nano Energy. 2020 Jul 22;77:105131. doi: 10.1016/j.nanoen.2020.105131

Fig. 13.

Fig. 13.

SOI wafers-based UWEH. a) A 2-DOF SOI MEMS-based UWEH device. Reproduced with permission [134]. Copyright 2010, Institute of Electrical and Electronics Engineers. b) A 3-DOF SOI MEMS-based UWEH device. Reproduced with permission [135]. Copyright 2013, IOP Publishing. c) Charging performance of an omnidirectional SOI MEMS-based harvester. Reproduced with permission [136]. Copyright 2014, Institute of Electrical and Electronics Engineers.