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Micro-structures produced through photolithography techniques. (a) Pyramids [24] (Copyright © 2020, Springer Nature). (b) Pillars (reprinted with permission from [31]. Copyright 2015 American Chemical Society, Washington, WA, USA). (c) Hairs [131] (Copyright © 2020, Springer Nature). (d) Domes (reprinted with permission from [133]. Copyright 2014 American Chemical Society, Washington, WA, USA). (e) Triangular lines [41] (Copyright © 2020, Springer Nature).
