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. 2020 Jun 23;21(1):371–378. doi: 10.1080/14686996.2020.1775477

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© 2020 The Author(s). Published by National Institute for Materials Science in partnership with Taylor & Francis Group.

This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Figure 3. — Operating modes of the EG-ISFET sensors with high-k engineering oxide and in-plane control gates: (a) SG, (b) DG, and (c) IG sensing modes.