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Equivalent circuits for the sensing modes of the EG-ISFET sensor: (a) SG, (b) DG, and (c) IG. C1 is the top gate insulator capacitance, C2 is the bottom gate insulator capacitance, C3 is the in-plane gate insulator capacitance, CIGZO is the a-IGZO depletion capacitance, and CSens is the sensing membrane capacitance.
