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pH sensing characteristics of EG-ISFETs with high-k engineered top gate insulators and in-plant control gates.
| Device | Operation mode | Sensitivity (mV/pH) | Hysteresis (mV) | Drift rate (mV/hour) | Hysteresis for sensitivity (%) | Drift rate for sensitivity (%) |
|---|---|---|---|---|---|---|
| A | SG | 56 | 11 | 7 | 19 | 13 |
| DG | 581 | 32 | 60 | 6 | 10 | |
| IG | 1435 | 77 | 76 | 5 | 5 | |
| B | SG | 56 | 12 | 14 | 22 | 25 |
| DG | 1039 | 74 | 60 | 7 | 6 | |
| IG | 2364 | 115 | 109 | 5 | 5 |
