Fig. 14.
(a) Schematic and (b) photographic image of a MEMS-based gas sensor. (c) temperature distribution of the microheater. Reproduced from Ref. 128 with permission from Elsevier (Copyright 2020).
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.