Table 13.4.
Recommended particle generation rate
| No. | 1 | 2 | 3 | 4 | 5 | 6 | |
|---|---|---|---|---|---|---|---|
| Particle generation rate/[#/(min · people)] | During activity | 106 | 106 | 106 | 3.3 × 106 | 105 | 5 × 105 |
| At rest (or basically) | – | – | – | – | – | 105 | |
| Particle generation rate from surface/[#/(min · people)] | 4.5 × 105 | 4.5 × 105 | Not considered | Not considered | Not considered | 1.25 × 104 | |
| Source | Ref. [5] and forum material from Japan electronic industry and measuring instrument exhibition in 1,975 | Thematic information about integrated circuit factories in Japan through investigation by No. 10 Design Institute of the former Fourth Ministry of Machinery and Industry | Ref. [6] | Ref. [7] | Ref. [8] | This book | |