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Comparison of calculated results about several kinds of particle generation rates
| No. of particle generation rate (same as Table 13.4) | Ratio between calculated and measured values (%) | ||||||
|---|---|---|---|---|---|---|---|
| 1 | 2 | 3 | 4 | 5 | 6 | ||
| Calculated value deviating from the measured value | ≤ ±30 | Deviation is too big, so comparison result is not given | 56 | ||||
| ≤ ±50 | 7 | 50 | 28 | 10 | 71 | ||
| ≤ ±100 | 22 | 74 | 85 | ||||
| ≤ ±200 | 50 | 74 | |||||
