Table 14.1.
Values of and
Turbulent flow cleanroom with small air change rate | Turbulent flow cleanroom with large air change rate (120 h−1 or above) | HEPA filters installed on the ceiling (or wall) with 40 % area | Filters installed fully | ||
---|---|---|---|---|---|
Calculation with room average concentration |
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1–1.2 | 0.64–0.86 | 0.4 | – |
Calculation with concentration in mainstream area |
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0.75–0.84 | 0.43–0.65 | 0.2 | 0.1 |
Note: N and N v are the room average particle concentrations calculated with the uniform and the nonuniform distribution theories, respectively. N a is the particle concentration in the mainstream area calculated with the nonuniform distribution theory