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. 2013 Aug 8:649–696. doi: 10.1007/978-3-642-39374-7_14

Table 14.1.

Values of Inline graphic and Inline graphic

Turbulent flow cleanroom with small air change rate Turbulent flow cleanroom with large air change rate (120 h−1 or above) HEPA filters installed on the ceiling (or wall) with 40 % area Filters installed fully
Calculation with room average concentration Inline graphic 1–1.2 0.64–0.86 0.4
Calculation with concentration in mainstream area Inline graphic 0.75–0.84 0.43–0.65 0.2 0.1

Note: N and N v are the room average particle concentrations calculated with the uniform and the nonuniform distribution theories, respectively. N a is the particle concentration in the mainstream area calculated with the nonuniform distribution theory