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. 2013 Aug 8:649–696. doi: 10.1007/978-3-642-39374-7_14

Table 14.9.

Comparison of the size of clean area when N a/N b < 1 %

No. Condition Air supply velocity in clean area (m/s) Total flow rate/(m3/h) Ratio of the minimum side length of the cross section in clean area at the working height to the side length of the air supply cross section (%) The minimum cross-sectional area in the clean area at the working height (m2) Ref.
1 150 mm air curtain 0.31 8,743 105 2.1 × 2.1 [19]
2 100 mm air curtain 0.31 8,743 85 1.7 × 1.7
3 75 mm air curtain 0.31 8,743 85 1.7 × 1.7
4 225 mm air curtain 0.3 11,529 131 Convert with square: 2.4 × 2.4
5 75 mm air curtain 0.3 6,561 60 Convert with square: 1.51 × 1.51 [9]
6 Vertical unidirectional flow without air curtain 0.31 4,397 64 1.28 × 1.28 [19]
7 Vertical unidirectional flow without air curtain 0.5 7,200 78.7 Convert with square: 1.64 × 1.64 [9]