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Performance of ULPA filter
| Type | Particle counting efficiency under nominal flow rate | Resistance under nominal flow rate | Comment |
|---|---|---|---|
| % | Pa | ||
| D | 99.999 | ≤250 | Scanning leakage detection |
| E | 99.9999 | ≤250 | Scanning leakage detection |
| F | 99.99999 | ≤250 | Scanning leakage detection |
