Fig. 45.

(a) Variation of κ as a function of frequency at 2 V for FMOF-1, FN-PCP-1, Ag₂(BTB), FMOF-3, and lc-[Cu(BTB)(DMF)]. Reproduced with permission from [396]. Copyright 2019 John Wiley and Sons. (b) Two proposed routes for the integration of ultra-low-k MOF dielectrics in on-chip interconnects via the MOF-CVD process. (c) Positioning of MOFs on the Young’s modulus/k-value map in comparison with other classes of advanced low-k dielectrics. Reproduced with permission from [397]. Copyright 2019 Springer Nature.