Table 5.
(C)RM | Δm (nm) | umeas (nm) | uCRM (nm) | ut (nm) | RD (%) | Significant Bias 1? |
---|---|---|---|---|---|---|
ERM-FD100 | 3.8 | 0.2 | 0.7 | 0.7 | 19 | Yes |
ERM-FD304 | 5.6 | 0.7 | 1.5 | 1.7 | 17 | Yes |
NS-0050A | 4.1 | NA | NA | NA | 8 | No |
ERM-FD101b | 4.1 | 0.1 | 4.0 | 4.0 | 5 | No |
NS-0100A | 4.0 | NA | NA | NA | 4 | No |
NS-0150A | 9.2 | NA | NA | NA | 6 | No |
NS-0200A | 15.0 | NA | NA | NA | 7 | No |
1 Confidence level of approximately 95%. NA, not applicable.