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The nitrogen content, Ω value, δ value, and the roughness of films at different RN2.
| RN2 (%) | 0 | 10 | 20 | 30 | 40 | 50 |
|---|---|---|---|---|---|---|
| Nitrogen Content (at %) | 0 | 5.94 | 10.97 | 25.10 | 29.55 | 32.21 |
| Ω | 1.60 | 1.31 | 0.44 | 0.23 | 0.20 | 0.19 |
| δ | 6.39% | 13.14% | 16.43% | 22.97% | 24.45% | 25.21% |
| Ra (nm) | 1.375 | 1.574 | 3.780 | 4.542 | 4.490 | 5.574 |
