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. Author manuscript; available in PMC: 2020 Oct 6.
Published in final edited form as: J Electrochem Soc. 2018;165(7):https://doi.org/10.1149/2.0911807jes.

Figure 3.

Figure 3.

a) Cross-sectioned annular TSVs after 20 s idle at −1.05 V followed by 10 minutes of Ni deposition, substrate rotation rate 100 rpm, for the indicated PEI concentrations and overpotentials. (Fig. 3 of Ref. 23). b) Simulations from the S-NDR model for the experimental conditions and other parameters from Table I. Isocontours of suppressor concentration, scaled by the bulk concentration, and metal ion concentration are overlaid on the unfilled volume of the TSV on the left and right sides, respectively, of each simulation. Color scales are shown on the two corresponding sides of the simulations.