Figure 8.
Cross-sectioned annular TSV after Ni deposition in electrolyte containing 10 μmol/L PEI for a) 30 min at −1.23 V versus 20 min at −1.23 V then 20 min at −1.27 V. A narrow void is barely evident in the lower portion of the TSV after deposition at the two potentials. b) Simulations for the same deposition times